Lithography is the process by which a design consistent with a determined geometric pattern is transferred to a substrate, in such a way that this substrate is structured on a micro or nanoscale.

Nanoimprinting lithography

Hot embossing/nanoimprinting lithography enables structuring by both discontinuous and continuous methods thermoplastic polymers either deposited as a fine layer on a substrate. In the latter case it enables the replication of the original mould (master) or its inverse, by combining the technique with processes of etching or deposition.

Employing these processes, resolutions within the range of the master can be obtained, including structures falling within a range of tenths of nanometers.

Ultraviolet (UV) lithography

The ultraviolet photolithography aligner enables carrying out photolithographic processes on flat substrates of up to 6 inches diameter (which may be extended to larger surfaces), for manufacturing microstructures (resolution of up to 1 µm) that can be employed in sensor systems, microfluidics, soft lithographic and other systems.

The process is compatible with the EVG 501 anodic bonding equipment and enables the alignment of the substrate on both sides.

Characteristics of the lithography

  • Nanoimprinting lithography enables the fast manufacture of polymeric prototypes.
  • Nanoimprinting lithography enables the replication of stamps with nanometric patterns.
  • The micro and nanostructured substrates manufactured using lithography can be employed for highly diverse applications (optical and photonic, biotechnology, sensor systems, obtaining superhydrophobic surfaces, decorative finishes, anti-counterfeiting designs, and so on).

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Industrial sectors

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