Tekniker

Piezo-resistive sensor

Objective

To manufacture a piezoresistive sensor.

Results

The manufacture of a high-sensitivity pressure sensor for fluids.

Piezo-resistive sensor

The piezoresistive effect, i.e. the change in electric resistance of a semiconductor or a metal when subjected to mechanical deformation, may be employed in pressure sensors.

In this case, a pressure sensor for high-sensitivity fluids was manufactured, based on a flexible membrane which supports connected gauges, thus forming a Wheatstone bridge circuit for maximising the sensor outlet and reduce sensitivity to errors.

Anodic bonding ensures a robust design and the channelling of the fluid to be monitored towards the membrane.

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